Flow-rate Modulation Epitaxy of AlN on Nonpolar m-plane AlN Substrates
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- Nishinaka Junichi
- NTT BRL
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- Taniyasu Yoshitaka
- NTT BRL
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- Akasaka Tetsuya
- NTT BRL
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- Kumakura Kazuhide
- NTT BRL
Bibliographic Information
- Other Title
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- 無極性m面AlN基板上へのAlNの流量変調エピタキシ
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2016.1 (0), 3477-3477, 2016-03-03
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390858397088539520
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC