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Removal of damaged layer on 4H-SiC surface and its effects using Si-vapor etching
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- Torimi Satoshi
- Toyo Tanso Corp.
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- Yabuki Norihito
- Toyo Tanso Corp.
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- Shinohara Masato
- Toyo Tanso Corp.
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- Teramoto Youji
- Toyo Tanso Corp.
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- Nogami Satoru
- Toyo Tanso Corp.
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- Kaneko Tadaaki
- Kwansei Gakuin Univ.
Bibliographic Information
- Other Title
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- Si蒸気圧エッチング法による4H-SiC表面の加工変質層除去とその効果
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.2 (0), 3229-3229, 2015-08-31
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390858773326316288
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC