Optimization of Cylindrical Cavity Excitation for Large-Area Microwave Plasma Generation II
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- Hasegawa Yuichi
- Chubu Univ.
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- Ogawa Daisuke
- Chubu Univ.
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- Nakamura Keiji
- Chubu Univ.
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- Kobayashi Satoru
- Applied Materials
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- Sugai Hideo
- NISRI
Bibliographic Information
- Other Title
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- 大面積マイクロ波プラズマの円筒キャビティ励起の最適化Ⅱ
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.1 (0), 1621-1621, 2015-02-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390859016476889856
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC