Polarity control of ZnO thin films by a RF Magnetron Sputtering Method
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- Tsunoda Kei
- Hosei Univ. NIMS
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- Ohsawa Takeo
- NIMS
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- Ohashi Naoki
- NIMS
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- Ishigaki Takamasa
- Hosei Univ.
Bibliographic Information
- Other Title
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- 高周波マグネトロンスパッタリング法によるZnO薄膜の極性制御
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.1 (0), 3869-3869, 2015-02-26
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390859016478902784
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC