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Analysis of Crystalline in GaN Epitaxial Layer after the Wafer Dicing Process
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- Taguchi Hideyuki
- KOBELCO Research Inst., Inc., Japan Osaka Univ., Japan
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- Kitahara Amane
- KOBELCO Research Inst., Inc., Japan
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- Miyake Syugo
- KOBELCO Research Inst., Inc., Japan
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- Nakaue Akimitsu
- KOBELCO Research Inst., Inc., Japan
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- Fujiwara Yasufumi
- Osaka Univ., Japan
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2013.2 (0), 701-701, 2013-08-31
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390859989726109824
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- ISSN
- 24367613
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- Text Lang
- en
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- Data Source
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- JaLC