中負荷向けドライ真空ポンプEV-X型

DOI Web Site

書誌事項

タイトル別名
  • Model EV-X, Dry Vacuum Pump for Middle Harsh Process

抄録

<p>In the pursuit of miniaturization of devices, semiconductor manufacturing processes have developed nanometer-order microfabrication technology and three-dimensional processing technology, and as manufacturing technology evolves, it has become significantly more complex. Furthermore, while semiconductor manufacturing processes are evolving and production volumes are increasing, there is also the issue of increasing environmental burdens such as CO2 emissions during the manufacturing process. In 2021, we launched dry vacuum pump, Model EV-X which flexibly responds to the diversity and complexity of the evolving semiconductor manufacturing process and reduces environmental impact. Model EV-X has a wide range of process applicability due to its high flow performance and wide range temperature control function. And also contributes to reducing CO2 emissions through its smaller footprint and energy-saving performance.</p>

収録刊行物

  • 表面と真空

    表面と真空 67 (4), 169-171, 2024-04-10

    公益社団法人 日本表面真空学会

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ