CuOナノ粒子を用いたフェムト秒レーザー還元直接描画法

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タイトル別名
  • Direct-Writing Technique Using Femtosecond Laser Reductive Sintering of CuO Nanoparticles
  • CuO ナノ リュウシ オ モチイタ フェムトビョウ レーザー カンゲン チョクセツ ビョウガホウ

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抄録

2D and 3D metal microstructures were directly written using the femtosecond laser reductive sintering of metal oxide nanoparticles. We coated CuO nanoparticle solutions, including CuO nanoparticles, a reductant agent, and a dispersant, on glass substrates. Then the focused femtosecond laser pulses were irradiated onto the solution film to write the microstructures in air. Finally, the non-irradiated CuO nanoparticles were removed. Cu-rich and Cu2O-rich microstructures were selectively fabricated by controlling the laser irradiation conditions. We applied this process to the fabrication of 2D Cu/Cu2O microtemperature sensors and 3D Cu-rich micro flow sensors. We believe this process is useful for fabricating various sensors on arbitral shaped substrates in air.

収録刊行物

  • レーザー研究

    レーザー研究 46 (5), 257-, 2018

    一般社団法人 レーザー学会

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