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Reversal of UV Sensitivity and Loss Reduction of SiON Microring Resonator by Thermal Annealing
Bibliographic Information
- Other Title
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- マイクロリング共振器用SiON光導波膜の紫外線感光性の起源と低損失化の探求
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Journal
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- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
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電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 106 (54), 37-42, 2006-05-19
東京 : 電子情報通信学会
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Keywords
Details 詳細情報について
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- CRID
- 1520009408104072960
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- NII Article ID
- 110004745213
- 10018155727
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- NII Book ID
- AN10442691
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- ISSN
- 09135685
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- NDL BIB ID
- 7938548
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- Text Lang
- en
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- NDL Source Classification
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- ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)
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- Data Source
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- NDL Search
- CiNii Articles