Low Damage Depth Profiling and Removal of damaged Layer of Polymer Materials with Ar Gas Cluster Ion Beam

Details 詳細情報について

• CRID

  1520009409833889792

• NII Article ID

  40020674974

• NDL BIB ID

  026978200

• Web Site

  http://id.ndl.go.jp/bib/026978200

  https://ndlsearch.ndl.go.jp/books/R000000004-I026978200

• Text Lang

  en

• NDL Source Classification

  • ZP5(科学技術--化学・化学工業--化学工学)

• Data Source

  • NDL
  • CiNii Articles