Summary of Characterizations of Sol-Gel-Derived Crystalline HfO₂, ZrO₂, ZrO₂-Y₂O₃ Thin Films on Si(001) Wafers with High Dielectric Constant

Details 詳細情報について

• CRID

  1520290882966134400

• NII Article ID

  40020809081

• NII Book ID

  AA11163716

• ISSN

  13432885

• NDL BIB ID

  027264958

• Web Site

  http://id.ndl.go.jp/bib/027264958

  https://ndlsearch.ndl.go.jp/books/R000000004-I027264958

• Text Lang

  en

• NDL Source Classification

  • ZM2(科学技術--科学技術一般--大学・研究所・学会紀要)

• Data Source

  • NDL
  • CiNii Articles