Development of highly integrated quartz micro-electro-mechanical system tilt sensor
Bibliographic Information
- Other Title
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- Development of highly integrated quartz micro electro mechanical system tilt sensor
- Special issue: Microprocesses and nanotechnology
- Special issue Microprocesses and nanotechnology
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Description
コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
Journal
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- Japanese journal of applied physics : JJAP
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Japanese journal of applied physics : JJAP 48 (6), 2009-06
Tokyo : The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1520290883332189056
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- NII Article ID
- 40016627334
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- NII Book ID
- AA12295836
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- ISSN
- 00214922
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- NDL BIB ID
- 10260955
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- Text Lang
- en
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- NDL Source Classification
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- ZM35(科学技術--物理学)
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- Data Source
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- NDL Search
- CiNii Articles