COMPREHENSIVE REVIEW : Revolution of Sensors in Micro-Electromechanical Systems

DOI Web Site Web Site Web Site 4 Citations 10 References

Search this article

Description

<jats:p> Microsensors realized by micro-electromechanical systems (MEMS) technology play a key role as the input devices of systems. In this report, the following sensors are reviewed: piezoresistive and capacitive pressure sensors, surface acoustic wave (SAW) wireless pressure sensors, tactile sensor networks for robots, accelerometers, angular velocity sensors (gyroscopes), range image sensors using optical scanners, infrared imagers, chemical sensing systems as Fourier transform infrared (FTIR) spectroscopy and gas chromatography, flow sensors for fluids, and medical sensors such as ultrafine optical-fiber blood pressure sensors and implantable pressure sensors. </jats:p>

Journal

Citations (4)*help

See more

References(10)*help

See more

Details 詳細情報について

Report a problem

Back to top