Five Mirror System Derived from the Numerical Solutions of All Zero 3rd-Order Aberrations and Zero 5th-Order Spherical Aberration for Deep-Ultraviolet Optical Lithography

Details 詳細情報について

• CRID

  1520572360202094848

• NII Article ID

  40001174978

• NII Book ID

  AN00080324

• ISSN

  03896625

• NDL BIB ID

  3867822

• Web Site

  http://id.ndl.go.jp/bib/3867822

  https://ndlsearch.ndl.go.jp/books/R000000004-I3867822

• Text Lang

  ja

• NDL Source Classification

  • ZM35(科学技術--物理学)

• Data Source

  • NDL Search
  • CiNii Articles