Variation of Stress and Hardness of a-Sic:H Films with Film Composition

Details 詳細情報について

• CRID

  1520572360224856960

• NII Article ID

  110007530173

• NII Book ID

  AN00103204

• ISSN

  02863383

• NDL BIB ID

  3953969

• Web Site

  http://id.ndl.go.jp/bib/3953969

  https://ndlsearch.ndl.go.jp/books/R000000004-I3953969

• Text Lang

  en

• NDL Source Classification

  • ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)

• Data Source

  • NDL Search
  • CiNii Articles