Characteristics of metal-oxide-semiconductor field-effect transistors with HfO2/SiO2/Si and HfO2/SiOxNy/Si stack structures formed by remote plasma technique

Bibliographic Information

Other Title
  • Characteristics of metal oxide semiconductor field effect transistors with HfO2 SiO2 Si and HfO2 SiOxNy Si stack structures formed by remote plasma technique

Search this article

Abstract

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

Journal

Details 詳細情報について

Report a problem

Back to top