Annealing of hydrogenated diamond-like carbon films deposited on ground electrode of plasma enhanced chemical vapor deposition system

DOI Web Site Web Site Web Site 参考文献9件

書誌事項

タイトル別名

Annealing of hydrogenated diamond like carbon films deposited on ground electrode of plasma enhanced chemical vapor deposition system

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP

Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 46 (9A), 5901-5907, 2007-09

Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics