Control of residual stress in thin films by substrate vibration and their mechanical property

Details 詳細情報について

• CRID

  1520853834688868096

• NII Article ID

  40020216749

• NII Book ID

  AA11484797

• ISSN

  13449672

• NDL BIB ID

  025822535

• Web Site

  http://id.ndl.go.jp/bib/025822535

  https://ndlsearch.ndl.go.jp/books/R000000004-I025822535

• Text Lang

  en

• NDL Source Classification

  • ZM2(科学技術--科学技術一般--大学・研究所・学会紀要)

• Data Source

  • NDL
  • CiNii Articles