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静電チャック用誘電体材料
Bibliographic Information
- Other Title
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- セイデンチャックヨウ ユウデンタイ ザイリョウ
- Electrostatic Chuck Dielectric Material
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Journal
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- 耐火材料 = Refractory material : Krosaki Harima technical report
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耐火材料 = Refractory material : Krosaki Harima technical report (168), 60-66, 2020
北九州 : 黒崎播磨
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Details 詳細情報について
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- CRID
- 1522825130912028928
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- NII Article ID
- 40022533504
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- NII Book ID
- AN00352093
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- ISSN
- 04945549
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- NDL BIB ID
- 031384881
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- Text Lang
- ja
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- NDL Source Classification
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- ZP9(科学技術--化学・化学工業--無機化学・無機化学工業--セラミックス・窯業)
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- Data Source
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- NDL Search
- CiNii Articles
