HREM study of ion implantation in 6H-SiC at high temperatures
Bibliographic Information
- Other Title
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- HREM study of ion implantation in 6H-Si
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Journal
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- Journal of electron microscopy
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Journal of electron microscopy 46 (4), 271-279, 1997-08
Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press
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Details 詳細情報について
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- CRID
- 1523106604979777024
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- NII Article ID
- 10008811968
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- NII Book ID
- AA00697060
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- ISSN
- 00220744
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- NDL BIB ID
- 4317174
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- Text Lang
- en
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- NDL Source Classification
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- ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)
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- Data Source
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- NDL
- CiNii Articles
