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論文紹介 Growth of high quality Ge epitaxial layer on Si(100) substrate using ultra thin Si0.5Ge0.5 buffer
Bibliographic Information
- Other Title
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- ロンブン ショウカイ Growth of high quality Ge epitaxial layer on Si 100 substrate using ultra thin Si0 5Ge0 5 buffer
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Journal
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- キヤノンアネルバ技報
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キヤノンアネルバ技報 12 54-59, 2006
[府中 (東京都) ] : キヤノンアネルバ