Behavior of Organosilicon Molecules in Low-temperature Plasma Processes

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  • INOUE,Yasushi
    Research Center for Nuclear Materials Recycle, Nagoya University
  • TAKAI,Osamu
    Center for Integrated Research in Science and Engineering, Nagoya University

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  • 8 低温プラズマプロセス中の有機シリコン分子の挙動(プラズマの基礎・応用研究最前線(中部地区若手・中堅研究者の挑戦))

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