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High-Precision processing System for Thinning of Glass Substrate with Interference Filter Films and Its Characteristics
Journal
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- Sensors and Materials
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Sensors and Materials 6 (5), 255-, 1994
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Details 詳細情報について
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- CRID
- 1570291224282139008
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- NII Article ID
- 10004153796
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- Data Source
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- CiNii Articles