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Characterization of Bulk Micromachined Tunneling Tip Integrated with Positioning Actuator
Journal
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- Technical Digest of Micro Electro Mechanical Syst. (MEMS), 2002
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Technical Digest of Micro Electro Mechanical Syst. (MEMS), 2002 2002
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Details 詳細情報について
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- CRID
- 1570291225543534976
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- NII Article ID
- 10019289560
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- Data Source
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- CiNii Articles