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Development of micropattern fabrication technique using maskless exposure device equipped with an LCD projector
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- ITOGA Kazuyoshi
- Tokyo Women's Medical University
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- KOBAYASHI Jun
- Tokyo Women's Medical University
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- YAMATO Masayuki
- Tokyo Women's Medical University
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- OKANO Teruo
- Tokyo Women's Medical University
Bibliographic Information
- Other Title
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- 液晶プロジェクタを用いたマスクレス露光装置によるマイクロパターン作製技術の開発
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Journal
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- 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan
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電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan 2008 (16), 1-4, 2008-09-11
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Keywords
Details 詳細情報について
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- CRID
- 1570291225651765504
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- NII Article ID
- 10021923567
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- NII Book ID
- AA12049250
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- Text Lang
- ja
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- Data Source
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- CiNii Articles