- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Knowledge Graph Search feature is available on CiNii Labs
- 【Updated on June 30, 2025】Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
Wafer-scale surface activated bonding of silicon, silicon oxide and copper at low temperature
Journal
-
- 7th Int. Symposium on Semiconductor Wafer Bonding Science, Technology, and Applications, Paris, France, April/May 2003
-
7th Int. Symposium on Semiconductor Wafer Bonding Science, Technology, and Applications, Paris, France, April/May 2003 1040 2003
- Tweet
Details 詳細情報について
-
- CRID
- 1570291226082659840
-
- NII Article ID
- 10026007316
-
- Data Source
-
- CiNii Articles