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Reliability evaluation of HfSiON gate dielectric film with 12.8 A SiO2 equivalent thickness
Journal
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- Proceedings of IEDM Tech. Digest, 2001
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Proceedings of IEDM Tech. Digest, 2001 2001
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Details 詳細情報について
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- CRID
- 1570291226803963904
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- NII Article ID
- 80015142346
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- Data Source
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- CiNii Articles