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The Examination of Validity of the Effective Chanel Length Extraction Method with TCAD
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- KIDERA Makoto
- Mitsubishi Electric Corporation ULSI Development Center
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- TANIZAWA Motoaki
- Mitsubishi Electric Corporation ULSI Development Center
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- ISHIKAWA Kiyoshi
- Mitsubishi Electric Corporation ULSI Development Center
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- NISHIMURA Tadashi
- Mitsubishi Electric Corporation ULSI Development Center
Bibliographic Information
- Other Title
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- TCADを用いた実効チャネル長抽出法の有効性の検討
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Description
ΔL is the one of the main factors that decide the device's performance. the ΔL is used for E-T data[5] in the process monitor. The gate voltage modulates the extrinsic resistance, so the ΔL depends on the gate voltage. When the device is the LDD structure, the capacitance based method has dependence on the gete voltage. So it is difficult to extract device's own ΔL. This paper describes the method that adopts the maximum value in the ΔL-Vgs charcteristic as the ΔL. This method does not need to decide the gate voltage for the extraction point. So this method is effective to extract ΔL in the process monitoring.
Journal
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- IEICE technical report. Electron devices
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IEICE technical report. Electron devices 98 (348), 37-43, 1998-10-23
The Institute of Electronics, Information and Communication Engineers
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Details 詳細情報について
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- CRID
- 1570291227426436224
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- NII Article ID
- 110003200588
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- NII Book ID
- AN10012954
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- Text Lang
- ja
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- Data Source
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- CiNii Articles