The Examination of Validity of the Effective Chanel Length Extraction Method with TCAD

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Other Title
  • TCADを用いた実効チャネル長抽出法の有効性の検討

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Description

ΔL is the one of the main factors that decide the device's performance. the ΔL is used for E-T data[5] in the process monitor. The gate voltage modulates the extrinsic resistance, so the ΔL depends on the gate voltage. When the device is the LDD structure, the capacitance based method has dependence on the gete voltage. So it is difficult to extract device's own ΔL. This paper describes the method that adopts the maximum value in the ΔL-Vgs charcteristic as the ΔL. This method does not need to decide the gate voltage for the extraction point. So this method is effective to extract ΔL in the process monitoring.

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Details 詳細情報について

  • CRID
    1570291227426436224
  • NII Article ID
    110003200588
  • NII Book ID
    AN10012954
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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