Comprehensive Study of the Resistivity of Copper Wires with Lateral Dimensions of 100 nm and Smaller
Journal
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- J. Appl. Phys.
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J. Appl. Phys. 97 "023706-1"-"023706-7", 2005
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Details 詳細情報について
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- CRID
- 1570572700384247552
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- NII Article ID
- 10018853946
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- Data Source
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- CiNii Articles