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Ultra-thin high quality Ta_2O_5 gate dielectric prepared by in-situ rapid thermal process
Journal
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- IEDM Tech. Dig., 1998
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IEDM Tech. Dig., 1998 1998
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Details 詳細情報について
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- CRID
- 1570572700675313792
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- NII Article ID
- 10022520022
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- Data Source
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- CiNii Articles