Development of Decoupling Wire Driven Microarm for ESD

  • KAWAHARA T.
    Graduate School of Engineering, Nagoya University
  • MATSUMOTO T.
    Graduate School of Engineering, Tohoku University
  • OWAKI H.
    Graduate School of Engineering, Nagoya University
  • MURAMATSU N.
    Department of Research, Nagoya Industrial Science Research Institute
  • OSADA T.
    Graduate School of Medicine, Juntendo University
  • SAKAMOTO N.
    Graduate School of Medicine, Juntendo University
  • ARAI F.
    Graduate School of Engineering, Nagoya University

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Other Title
  • ESDのためのワイヤ非干渉駆動マイクロアームの開発

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