A Micromechanical Accelerometer Fabricated by (110)Si Anisotropic Etching

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Bibliographic Information

Other Title
  • (110)Siの異方性エッチングを応用した加速度センサ

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Details 詳細情報について

  • CRID
    1570854175519490944
  • NII Article ID
    10019051614
  • NII Book ID
    AA11135867
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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