Evaluation of Damage Induced by Low-Energy Ion Irradiation in Silicon
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- BABA Akiyoshi
- Department of Electrical Engineering,Faculty of Engineering,Kyushu University
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- SADOH Taizoh
- Department of Electronics,Faculty of Engineering,Kyushu University
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- KENJO Atsushi[et al.]
- Department of Electrical Engineering,Faculty of Engineering,Kyushu University
Search this article
Journal
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- Memoirs of the Faculty of Engineering, Kyushu University
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Memoirs of the Faculty of Engineering, Kyushu University 55 (2), 127-138, 1995-06
Kyushu University
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Details 詳細情報について
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- CRID
- 1570854176796709248
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- NII Article ID
- 110000020153
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- NII Book ID
- AA00732525
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- ISSN
- 00236160
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- Text Lang
- en
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- Data Source
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- CiNii Articles