A Ruthenium-Based Multimetal-Contact RF MEMS Switch with a Corrugated Diaphragm
収録刊行物
-
- J. Microelectromech. Syst.
-
J. Microelectromech. Syst. 17 1447-1459, 2008
J. Microelectromech. Syst. 17 1447-1459, 2008