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An Application of pn Diode Temperature Sensor to the Measurement of Vacuum pressure
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- TERADA Tomoyuki
- MEMS・CORE Co., Ltd.
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- SAKURAI Fumitoshi
- MEMS・CORE Co., Ltd.
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- OHTA Hirao
- MEMS・CORE Co., Ltd.
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- MIYAKAWA Hisayuki
- MEMS・CORE Co., Ltd.
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- KIMURA Mitsuteru
- Tohoku-Gakuin University
Bibliographic Information
- Other Title
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- pnダイオード温度センサのMEMS型真空センサへの応用
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Journal
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- 電気学会研究会資料. PHS, フィジカルセンサ研究会
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電気学会研究会資料. PHS, フィジカルセンサ研究会 2005 (1), 7-10, 2005-06-22
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Details 詳細情報について
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- CRID
- 1571980075166273280
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- NII Article ID
- 10016471385
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- NII Book ID
- AA11486078
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- Text Lang
- ja
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- Data Source
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- CiNii Articles