- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Automatic Translation feature is available on CiNii Labs
- Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
Microfabrication of Anti-Reflective Chromium Mask by Gas Plasma : A-1: DEVICE TECHNOLOGY (I)
-
- ABE Haruhiko
- Central Research Laboratory, Mitsubishi Electric Corp.
-
- NISHIOKA Kyusaku
- Kita-itami Works, Mitsubishi Electric Corp.
-
- TAMURA Setsuko
- Kita-itami Works, Mitsubishi Electric Corp.
-
- NISHIMOTO Akira
- Central Research Laboratory, Mitsubishi Electric Corp.
Search this article
Journal
-
- Japanese journal of applied physics. Supplement
-
Japanese journal of applied physics. Supplement 15 (1), 25-31, 1976
The Japan Society of Applied Physics
- Tweet
Details 詳細情報について
-
- CRID
- 1571980077370669568
-
- NII Article ID
- 110003953886
-
- NII Book ID
- AA10457686
-
- ISSN
- 00214922
-
- Text Lang
- en
-
- Data Source
-
- CiNii Articles
