An All-Capacitive Sensing Chip for Temperature, Absolute Pressure, and Relative Humidity

収録刊行物

• Dig. of Tech. Papers, The 12th Int. Conf. on Solid-State Sensors and Actuators (Transducers'03), Boston, USA (2005-6)

  Dig. of Tech. Papers, The 12th Int. Conf. on Solid-State Sensors and Actuators (Transducers'03), Boston, USA (2005-6) 2005