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Characterization of SiO_2 films by photo-CVD using Xe_2 excimer lamp
Journal
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- Electrochem. Soc. Proc. IEE Japan
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Electrochem. Soc. Proc. IEE Japan 2003 603-608, 2003
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Details 詳細情報について
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- CRID
- 1573105975729389824
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- NII Article ID
- 10025660180
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- Data Source
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- CiNii Articles