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A New Method for Phase Readout in Phase Modulated Interferometer
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- GE Zongtao
- Department of Mechatronics, Faculty of Engineering, Tohoku University
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- KIYONO Satoshi
- Department of Mechatronics, Faculty of Engineering, Tohoku University
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- NISHINO Yoichi
- Department of Mechatronics, Faculty of Engineering, Tohoku University
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Description
A simple time-counting phase readout method for a sawtooth phase modulated interferometer is proposed. In this method, the measured phase is estimated from time intervals between zero points of only one modulated interference signal. A compact differential interferometer using a laser diode as the light source is described. The interferometer is calibrated with a capacitance-type displacement sensor by exploiting the advantages of a lever system, and some experimental results are presented.
Journal
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- JSME international journal. Ser. C, Dynamics, control, robotics, design and manufacturing
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JSME international journal. Ser. C, Dynamics, control, robotics, design and manufacturing 39 (3), 509-514, 1996-09-01
The Japan Society of Mechanical Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1573105976825073408
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- NII Article ID
- 110004089564
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- NII Book ID
- AA10898309
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- ISSN
- 13408062
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- Text Lang
- en
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- Data Source
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- CiNii Articles
