Growth Process of Polyhedral Oxide Precipitates in Czochralski Silicon Crystals Annealed at 1100℃
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- SUEOKA Koji
- Sumitomo Metal Ind. Ltd.
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- IKEDA Naoki
- Sumitomo Metal Ind. Ltd.
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- YAMAMOTO Toshiro
- Sumitomo Metal Ind. Ltd.
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- KOBAYASHI Sumio
- Sumitomo Metal Ind. Ltd.
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Journal
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- Japanese journal of applied physics. Pt. 2, Letters
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Japanese journal of applied physics. Pt. 2, Letters 33 (11), L1507-L1510, 1994-11-01
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1573105977150726784
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- NII Article ID
- 110003921551
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- NII Book ID
- AA10650595
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- Text Lang
- en
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- Data Source
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- CiNii Articles