Chemical Durability of AMLCD Glass Substrate. : Corrosion of Glass Substrates by Hydrofluoric and Buffered Hydrofluoric Acids.

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Other Title
  • AMLCD用ガラス基板の耐薬品性 : 特にフッ酸およびバッファードフッ酸による浸食について

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Description

The chemical durability of AMLCD glass substrates was evaluated with various acids as HCI,HNO_3,H_2SO._24>,HF,Buffered hydrofluoric acid(BHF),and alkali,NaOH.When treated BHF,the surface of the glass substrates turned dim,sometimes.Microscopic obserbation revealed that the dim area corresponded to a lot of tiny hillocks.It has been concluded that there exist an effective composition of BHF as well as a recommendable cleaning condition of glass substrates to prevent the generation of tiny hillocks.

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Details 詳細情報について

  • CRID
    1573105977229964288
  • NII Article ID
    110003268948
  • NII Book ID
    AN10060775
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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