Doping Profile Control in Si MBE Film with Sb Ion Doping : C-3: CRYSTAL TECHNOLOGY

  • SUGIURA Hideo
    Ibaraki Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation

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Details 詳細情報について

  • CRID
    1573105977278208896
  • NII Article ID
    110003957284
  • NII Book ID
    AA10457686
  • ISSN
    00214922
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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