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Application of phase-shifting mask technology to 0.17-μm-gate GaAs MESFET for ultra high speed IC's
Journal
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- Digests Device Research Conference
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Digests Device Research Conference 1994
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Details 詳細情報について
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- CRID
- 1573387449275482368
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- NII Article ID
- 10006491675
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- Data Source
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- CiNii Articles