Monolayer Nitridation of Si(001) Surfaces
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- MORITA Yukinori
- Joint Research Center for Atom Technology (JRCAT)
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- ISHIDA Takao
- National Institute of Advanced Industrial Science and Technology (AIST)
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- TOKUMOTO Hiroshi
- Joint Research Center for Atom Technology (JRCAT)
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収録刊行物
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2001 230-231, 2001-09-25
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詳細情報 詳細情報について
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- CRID
- 1573668924953017600
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- NII論文ID
- 10015752764
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- NII書誌ID
- AA10777858
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- 本文言語コード
- en
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- データソース種別
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- CiNii Articles
