KrF Excimer Laser Process: Lateral and Surface Modification for Enhancing Resist Contrast
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- Minamiyama Takayuki
- ULSI Research Center, Toshiba Corporation
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- Kumagae Akitoshi
- ULSI Research Center, Toshiba Corporation
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- Sato Kazuo
- ULSI Research Center, Toshiba Corporation
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- Ito Shin-ichi
- ULSI Research Center, Toshiba Corporation
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- Nakase Makoto
- ULSI Research Center, Toshiba Corporation
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Abstract
A KrF excimer laser process, “lateral and surface modification for enhancing resist contrast” (LASER), combining alkali treatment before exposure and step development was investigated to improve the resolution capability of a novolac-diazoquinone-type positive tone photoresist. It has been found that a thin insoluble layer formed on both the resist surface and side wall maintains the resist thickness and the resist profile during development. As a result, a 0.35-μm line-and-space pattern with a steep profile can be obtained. The insoluble layer formation is due to the concentration of a photoactive compound, which is caused by the water rinse processes after the alkali treatment and the first step development.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 31 (6), 1928-1932, 1992
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1573950402131040256
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- NII Article ID
- 110003900810
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- NII Book ID
- AA10457675
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- Text Lang
- en
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- Data Source
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- CiNii Articles