Diffusion Barrier Characteristics of TiSix/TiN for Tungsten Dual Poly Gate in DRAM
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- SUNG Min Gyu
- Memory R&D Division, Hynix Semiconductor Inc.
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- LIM Kwan-Yong
- Memory R&D Division, Hynix Semiconductor Inc.
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- CHO Heung-Jae
- Memory R&D Division, Hynix Semiconductor Inc.
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- LEE Seung Ryong
- Memory R&D Division, Hynix Semiconductor Inc.
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- JANG Se-Aug
- Memory R&D Division, Hynix Semiconductor Inc.
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- KIM Yong Soo
- Memory R&D Division, Hynix Semiconductor Inc.
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- JOO Moon-Sig
- Memory R&D Division, Hynix Semiconductor Inc.
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- LEE Ju-Hee
- Memory R&D Division, Hynix Semiconductor Inc.
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- KIM Tae-Yoon
- Memory R&D Division, Hynix Semiconductor Inc.
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- YANG Hong-Seon
- Memory R&D Division, Hynix Semiconductor Inc.
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- PYI Seung-Ho
- Memory R&D Division, Hynix Semiconductor Inc.
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- KIM Jin Woong
- Memory R&D Division, Hynix Semiconductor Inc.
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2006 136-137, 2006-09-13
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- CRID
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- NII論文ID
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- NII書誌ID
- AA10777858
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