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An Electrostatic Lower Stator Axial-Gap Polysilicon Wobble Motor Part I : Design and Modeling
Journal
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- Journal of MEMS
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Journal of MEMS 7 (1), 79-86, 1998
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Details 詳細情報について
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- CRID
- 1574231876445538560
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- NII Article ID
- 80010199853
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- Data Source
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- CiNii Articles
