Preparation of Ferroelectric PbTiO<SUB>3</SUB> Thin Film by Reactive Sputtering

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Ferroelectric PbTiO3 thin films have been successfully obtained. The films were fabricated by reactive sputtering using a simple metal composite as a target. Without postannealing, the films with perovskite structure have been obtained at substrate temperatures of 600–620°C. The spontaneous polarization (Ps) and the coercive field (Ec) of a 0.70 μm-thick film were measured as 37 μC/cm2 and 86 kV/cm, respectively.

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