Electro-statically actuated light emitting device using OLED
説明
We propose a process of a light emitting device fabricated on the top surface of a micro structure. The proposed process has made it possible to fabricate light sources on silicon micro actuators released partly from the wafer. A light source is an Organic Light Emitting Diode (OLED) composed of electrodes and an organic layer evaporated on the top surface of a micro structure.
収録刊行物
-
- TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
-
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) 2 1506-1509, 2004-05-06
IEEE