Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching
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説明
We have developed an innovated fabrication technology of Si, GaAs, and Ge nano-structures, i.e., we called defect-free neutral beam etching. The technology has been successfully applied to prototype the quantum nano-disks and nano-wires with ferritin based bio-templates. SEM observation verifies that the designed structures are prototyped. Photoluminescence measurements demonstrates high optical quality of nano-structures based on the technology.
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 10027 100270Q-, 2016-11-17
SPIE