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Spatial profile of neutral free radical beam produced by the method of phot-deionization of negative ion beams
Description
We have been developing a trial surface processing apparatus utilizing a steady-flux refined beam of neutral free radicals (RBNR) produced by the PDINIB (photo-deionization of negative ion beams) method. We could improve the S/N ratio and the spatial resolution of the DNIC (decreasing negative ion beam current) measurement system 40 times and 7 times, respectively. This improved monitoring system is used for measurement of the spatial profile of the neutral-beam flux under various conditions of the neutral-beam productions.
Journal
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- Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
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Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference 272-273, 2004-05-13
Japan Soc. of Appl. Phys